| Title | Complex defect diffraction model and method for defect inspection of transparent substrate |
| Year | 2019 |
| Country | TW、US |
| Inventor | CHENG, CHAU JERN |
| Co-inventor | TU, HAN YEN; CHANG CHIEN, KUANG CHE; LIN, YU CHIH |
| Cert. No. | I664586、US 10,983,478 B2 |
| Introduction | A method for defect inspection of a transparent substrate comprises utilizing a wavefront reconstruction unit to obtain complex defect diffraction wavefront of a transparent substrate; using a complex defect diffraction module to confirm the effective diffraction distance of the complex defect diffraction wavefront; utilizing a defect detection module to detect position of the defect of the transparent substrate; using a defect classification module to perform extraction, analysis and classification of diffraction characteristics and utilizing a machine learning algorithm or a deep learning algorithm to automatically identify the defects. |
| Validity | 2038/03/21 |
| Domain | Opto-Electronic_Engineering |
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